Chintala, Suman. “Sonocrystallization for Optimized Chemical Mechanical Planarization (CMP) in Semiconductor Fabrication”. Journal of Research in Science and Engineering 7, no. 10 (October 30, 2025): 39–40. Accessed January 14, 2026. https://bryanhousepub.com/index.php/jrse/article/view/2663.