CHINTALA, Suman. Sonocrystallization for Optimized Chemical Mechanical Planarization (CMP) in Semiconductor Fabrication. Journal of Research in Science and Engineering, [S. l.], v. 7, n. 10, p. 39–40, 2025. DOI: 10.53469/jrse.2025.07(10).09. Disponível em: https://bryanhousepub.com/index.php/jrse/article/view/2663. Acesso em: 1 mar. 2026.